%PDF-1.5
%
1 0 obj
<<
/Metadata 2 0 R
/Type /Catalog
/PageLabels 3 0 R
/Pages 4 0 R
>>
endobj
5 0 obj
<<
/Meeting#20Starting#20Date (10 Oct. 2022)
/Creator (PScript5.dll Version 5.2.2)
/ModDate (D:20230216223425-05'00')
/IEEE#20Article#20ID (10046026)
/CreationDate (D:20230215162435-05'00')
/IEEE#20Issue#20ID (10045835)
/Producer <4163726F6261742044697374696C6C657220392E332E33202857696E646F7773293B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/Subject (2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications \(SPAWDA\);2022; ; ;10.1109/SPAWDA56268.2022.10046026)
/IEEE#20Publication#20ID (10045834)
/Title (Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered Structure)
/Meeting#20Ending#20Date (14 Oct. 2022)
>>
endobj
2 0 obj
<<
/Length 3903
/Subtype /XML
/Type /Metadata
>>
stream
application/pdfIEEE2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA);2022; ; ;10.1109/SPAWDA56268.2022.10046026Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered StructureShear-horizontal surface acoustic waveLithium Niobate (LiNbO<inf>3</inf>)Finite element methodMultilayer structureJinwei LiuJun MaLirong QianYuanyuan WangCuiping LiBaohe YangYahui TianHonglang Li
2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)31511 Oct. 202210.1109/SPAWDA56268.2022.10046026319
VoR
endstream
endobj
3 0 obj
<<
/Nums [0 6 0 R]
>>
endobj
4 0 obj
<<
/Kids [7 0 R 8 0 R 9 0 R 10 0 R 11 0 R]
/Type /Pages
/Count 5
/ITXT (2.1.7)
>>
endobj
6 0 obj
<<
/S /D
>>
endobj
7 0 obj
<<
/Contents [12 0 R 13 0 R 14 0 R]
/Type /Page
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 15 0 R]
>>
/ExtGState <<
/GS2 16 0 R
/GS3 17 0 R
>>
/ProcSet [/PDF /Text /ImageB /ImageC /ImageI]
/Font <<
/C2_2 18 0 R
/C2_1 19 0 R
/C2_4 20 0 R
/C2_3 21 0 R
/C2_0 22 0 R
/F1 23 0 R
/F7 24 0 R
>>
>>
/CropBox [0 0 595.22 842]
/Parent 4 0 R
/Rotate 0
/MediaBox [0 0 595.22 842]
>>
endobj
8 0 obj
<<
/Contents [25 0 R 26 0 R 27 0 R]
/Type /Page
/Resources 28 0 R
/CropBox [0 0 595.22 842]
/Parent 4 0 R
/Rotate 0
/MediaBox [0 0 595.22 842]
>>
endobj
9 0 obj
<<
/Contents [29 0 R 30 0 R 31 0 R]
/Type /Page
/Resources 32 0 R
/CropBox [0 0 595.22 842]
/Parent 4 0 R
/Rotate 0
/MediaBox [0 0 595.22 842]
>>
endobj
10 0 obj
<<
/Contents [33 0 R 34 0 R 35 0 R]
/Type /Page
/Resources <<
/ColorSpace <<
/Cs6 [/ICCBased 15 0 R]
>>
/ExtGState <<
/GS2 17 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageB /ImageI]
/Font <<
/TT5 20 0 R
/TT6 36 0 R
/TT4 21 0 R
/TT1 22 0 R
/TT2 19 0 R
/F1 37 0 R
/F7 24 0 R
>>
/XObject <<
/Im17 38 0 R
/Im9 39 0 R
/Im16 40 0 R
/Im19 41 0 R
/Im18 42 0 R
/Im11 43 0 R
/Im10 44 0 R
/Im13 45 0 R
/Im12 46 0 R
/Im15 47 0 R
/Im14 48 0 R
>>
>>
/CropBox [0 0 595.22 842]
/Parent 4 0 R
/Rotate 0
/MediaBox [0 0 595.22 842]
>>
endobj
11 0 obj
<<
/Contents [49 0 R 50 0 R 51 0 R]
/Type /Page
/Resources 52 0 R
/CropBox [0 0 595.22 842]
/Parent 4 0 R
/Rotate 0
/MediaBox [0 0 595.22 842]
>>
endobj
12 0 obj
<<
/Length 10
/Filter /FlateDecode
>>
stream
x+ |
endstream
endobj
13 0 obj
<<
/Length 10143
/Filter /FlateDecode
>>
stream
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