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application/pdfIEEE2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA);2022; ; ;10.1109/SPAWDA56268.2022.10046026Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered StructureShear-horizontal surface acoustic waveLithium Niobate (LiNbO<inf>3</inf>)Finite element methodMultilayer structureJinwei LiuJun MaLirong QianYuanyuan WangCuiping LiBaohe YangYahui TianHonglang Li
2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)31511 Oct. 202210.1109/SPAWDA56268.2022.10046026319
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