%PDF-1.5 % 1 0 obj << /Metadata 2 0 R /Type /Catalog /PageLabels 3 0 R /Pages 4 0 R >> endobj 5 0 obj << /Meeting#20Starting#20Date (10 Oct. 2022) /Creator (PScript5.dll Version 5.2.2) /ModDate (D:20230216223425-05'00') /IEEE#20Article#20ID (10046026) /CreationDate (D:20230215162435-05'00') /IEEE#20Issue#20ID (10045835) /Producer <4163726F6261742044697374696C6C657220392E332E33202857696E646F7773293B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29> /Subject (2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications \(SPAWDA\);2022; ; ;10.1109/SPAWDA56268.2022.10046026) /IEEE#20Publication#20ID (10045834) /Title (Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37°Y-47°X LINBO3/SIO2/SIC Multilayered Structure) /Meeting#20Ending#20Date (14 Oct. 2022) >> endobj 2 0 obj << /Length 3903 /Subtype /XML /Type /Metadata >> stream application/pdfIEEE2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA);2022; ; ;10.1109/SPAWDA56268.2022.10046026Theorectical Optimazation of Surface Acoustic Waves Resonator based on 37&#x00B0;Y-47&#x00B0;X LINBO3/SIO2/SIC Multilayered StructureShear-horizontal surface acoustic waveLithium Niobate (LiNbO<inf>3</inf>)Finite element methodMultilayer structureJinwei LiuJun MaLirong QianYuanyuan WangCuiping LiBaohe YangYahui TianHonglang Li 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)31511 Oct. 202210.1109/SPAWDA56268.2022.10046026319 VoR endstream endobj 3 0 obj << /Nums [0 6 0 R] >> endobj 4 0 obj << /Kids [7 0 R 8 0 R 9 0 R 10 0 R 11 0 R] /Type /Pages /Count 5 /ITXT (2.1.7) >> endobj 6 0 obj << /S /D >> endobj 7 0 obj << /Contents [12 0 R 13 0 R 14 0 R] /Type /Page /Resources << /ColorSpace << /CS0 [/ICCBased 15 0 R] >> /ExtGState << /GS2 16 0 R /GS3 17 0 R >> /ProcSet [/PDF /Text /ImageB /ImageC /ImageI] /Font << /C2_2 18 0 R /C2_1 19 0 R /C2_4 20 0 R /C2_3 21 0 R /C2_0 22 0 R /F1 23 0 R /F7 24 0 R >> >> /CropBox [0 0 595.22 842] /Parent 4 0 R /Rotate 0 /MediaBox [0 0 595.22 842] >> endobj 8 0 obj << /Contents [25 0 R 26 0 R 27 0 R] /Type /Page /Resources 28 0 R /CropBox [0 0 595.22 842] /Parent 4 0 R /Rotate 0 /MediaBox [0 0 595.22 842] >> endobj 9 0 obj << /Contents [29 0 R 30 0 R 31 0 R] /Type /Page /Resources 32 0 R /CropBox [0 0 595.22 842] /Parent 4 0 R /Rotate 0 /MediaBox [0 0 595.22 842] >> endobj 10 0 obj << /Contents [33 0 R 34 0 R 35 0 R] /Type /Page /Resources << /ColorSpace << /Cs6 [/ICCBased 15 0 R] >> /ExtGState << /GS2 17 0 R >> /ProcSet [/PDF /Text /ImageC /ImageB /ImageI] /Font << /TT5 20 0 R /TT6 36 0 R /TT4 21 0 R /TT1 22 0 R /TT2 19 0 R /F1 37 0 R /F7 24 0 R >> /XObject << /Im17 38 0 R /Im9 39 0 R /Im16 40 0 R /Im19 41 0 R /Im18 42 0 R /Im11 43 0 R /Im10 44 0 R /Im13 45 0 R /Im12 46 0 R /Im15 47 0 R /Im14 48 0 R >> >> /CropBox [0 0 595.22 842] /Parent 4 0 R /Rotate 0 /MediaBox [0 0 595.22 842] >> endobj 11 0 obj << /Contents [49 0 R 50 0 R 51 0 R] /Type /Page /Resources 52 0 R /CropBox [0 0 595.22 842] /Parent 4 0 R /Rotate 0 /MediaBox [0 0 595.22 842] >> endobj 12 0 obj << /Length 10 /Filter /FlateDecode >> stream x+| endstream endobj 13 0 obj << /Length 10143 /Filter /FlateDecode >> stream HWr+:GE,/vl-s'[#Nɇ>@؊lKjߎ.կG~?saV?:_/Gn[ >YV?x=j 6 +JA)g;h9uit`_4#EOÎ#tZ3 `CLuֿuv3 W֎6q0HHٕ>Np*+Jؕ|"S25_iNYF<UyH+Mrʩ~QɋVIOQQaciyV L2= +XW, {~@3 +p[JD{aᢢ (0`:j  $2Ya|ui#픡H}|Q\9#{V [) TmL9XwQ89;R}ڞ(a Kh9ͷ$ qƦ?f.u LJuЯ r n,̧ըTM XMprp(x O5 HnRW lvx` tuox9Vp:QWpl=m{`f ppZ@}O ){vH.KvlK3w,G ,1e#)S oSYް];n']n9v)Y ƪD^Er'&Y ՆU9/U;H&·!4#tү!2|p ㄹ=f p[tzQЃ5u= @3)P~8 P@W3z#X8b(NU0NT2 J)bgP@ 0ltZO2溅QYKY@_fg?MO{hL=+Ek}MI^})qe<^5N0Z5IW܎H#B}S`^uJOYSoQ55Hls<ظaXXj@t[毸vl2ȸCמ˵hX79 0i *Їfni(r6}N~W**ҎvWmH-ȭ<뢖}Cb}v9*l6dj*?XTX7 9N~+ƣEr:?sRD7ר?[׼9*(Iwx_ P G)..COL1eiE@0j10D%P}"u(%}a>6Fm jwfGd%]|WURo3 uR4v/'h~ XDb4c["vl-EJ½lf4v}z釈1VZӅrM9F0s%4ʷAo3b  &t'P) )N[4C%PNցeY>"4kǁSzf6:5 t "ܕ(ڴήdԁ@xW*wݘjH*"c +V":U(mo,Ԥtm^Γ$V]`K8O|ml H]dd#%^GYW#!A.aI(a\)?hܱr;Pr@L~c5&'4jm3F=*oT7AЅ]tuY"MƊ j\}[ c h]s".o"Fx* 논M'idf޺+$d"4yozm;5&:iNHBAK:"qAоF| kb8V%Mñ*΄B-*;‹0+mTB /q`c C̞}.CFݗh,K;JǮgjGHzB9h8f;xLxCW3tv='=7죵1˞-[>_>uX*Un:GױR]F0N,,RZ7 zFo“ZScV`Bf AF(=:뀠*YFژt5lm\̐c6==fj eJt`wWͧS,d//W#$W7.Y ?̥$L,U6ie-͌WB|g(w;@Ia7g>c%,–q)B%p/9H˷11l" =-U_əWѹSnϪTPLThpGZ gT;?>D 7fۏ3@tLl@'.fX΋4uD(=lΠr'7 ԺCpkW58)yCG<[o-gܳT^ev6n{q?sPMʇ$=Gܹ>Ұ- C2 6l*뢁7~[గhg;H)*GsԎ BH"Mc iVECqEy @y[ahTlJ]bV[<N;n [ 1 9Η=[յ r} i{@mkI(}jT*5$uXI kRʶdKi3|Ŵ^ThFs Zhui@H.aр.moy`(V8h_h82u+s/;T76E#&?e_7zO{;K'JkCeQ5O>]5ְkL~ƈzO<6̼dJJ4|tɎ-T!]Q1hhC(rDD?ٚx0- mD%¿.EɃT`h(1RR+cSQؠ+ =vmW>H4kR%CQz!K6[ϖ eH >KԈ3~ՐuxXabsqη\B&@흀uh L!s|wׂ˂ cG4tȻdwDG\(|B5Ra'[ gg9P>a:Cmm;܁ό%`!?TkLA} 7l#C kem|0yw+1?\e]h]YXymf(ejG* )yyLoyP+ Bh.6;eJqO9AOnUr0*pDѳQQI{tĦD+}L>TA 41kA6X.UI}Kb)^{q,#b씻Uf&lsC;_GXf5pu-*c%(=aW"N1]Eۊ;`.DRKjM~nt'ZuQm2&4C6j(JU<`u= ق&7q4&P]<ډS974}mqm˪)nlY*K82Vc3X+%&q@x%/?oOxoc-O{o:Hq=7=ou~?M?IF1憥Oa]c^Z:YL4$0'.Yҕzf1L/E ٢U/ óޠfkfwȅ\2J64Υfv)fv&>[>,5jx|Kב d卜 K}􄗿O1 k}Śod T̨*))9at֬g-eH 8 ވA;2z;T[LtF%5RR)xE>(Ph_0C[B?~]-Gczƕ695.31M9LOr&rcdF@BTbI=eJHlqplfitbרb$Gg}eu׉>rd?1U|E[v|@'Wύ+Jf ʲTߒ=!m6-% y1 8JW\=xDG7= e&p {F6gO>=+\OFנy8;fcLNs&U`rS"5h۴ %j%Kܑ|)KB(UthdaPwBZj$G+Z>ؑj-;hA:^lg̅xK1L #ujdY('qgӊk$Q6yGF^%̅;81G5Z4#D|!sO䳊]_}VW'A`]3\hrϦeyZkӧ-J2-N/ݕ&sw2/[ 2q5oҞf.JXBI36.o,I<$.O˧Q_0hz$7~j<9RQ}kֳi}#skU)b:}A&3yOUuۆ+=#w옾wݨC[p(3u3 4k Bs1w@ATTʘdk)SoEZs՘RqU73 ;\%8.5-jXQ:j}NjPF:hp he v@C.]i2[c3l'+ w{| {Zh1B1~ /Y܋& WoSZYhQdn~jIn0{I0ʷHaE)iČ^j6t7<8S֥iܵ`ErAv}}6Ӽ/ץCgkV]j8lxVV*C^sדZlQɷC)1+I}[+س/51"2({ezs=Inz;m灺0(sgSKe}(h7B_t+~ZD7C&R5a&&SY}/{dI(bZ1MIQ! _y',!3p-(_OZ (6v$+y2!nl7^2F "[o#Sdْ],zLrrlCiv=$G!}Ex*)}M)7I3_@Ŧ ߒ\ֱ=)%6)vEt箛1Ddsԣx#?X йQ%s/SX;ɱ+,adNZD!IwC@`R}m1J`sPsJnJ%4T”Bb=3JNl:@}Ed$O7r]ͦffYN=|+(Ku2(?@Ff CS VWz.:){xI;+|g*cG-݃~{?F~Q׽$t'c0tt=;G> SnpH*LHjԳk! }2OYGwe gl>2Ѽ lS 7ɲC'$O?EoRMLP9vK;x^t8]PcE` rs0Ř`D6 =_j^qM9}mɄ5&VE{/B"! 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