%PDF-1.6 % 1 0 obj << /OpenAction 2 0 R /PageMode /UseNone /PageLayout /SinglePage /Names 3 0 R /Metadata 4 0 R /Type /Catalog /Pages 5 0 R >> endobj 6 0 obj << /Meeting#20Starting#20Date (13 May 2024) /Creator (Causal Productions Pty Ltd) /ModDate (D:20240527093038-04'00') /IEEE#20Article#20ID (10539019) /CreationDate (D:20240418062856Z) /IEEE#20Issue#20ID (10538479) /Producer /Subject (2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics \(IC-MAM\);2024; ; ;10.1109/IC-MAM60575.2024.10539019) /IEEE#20Publication#20ID (10538478) /Title (Analysis of Plate Acoustic Waves Resonance Properties Using Thin Plate of LiNbO3/SiC) /Meeting#20Ending#20Date (15 May 2024) >> endobj 2 0 obj << /S /GoTo /D [7 0 R /FitH -32768] >> endobj 3 0 obj << /Dests 8 0 R >> endobj 4 0 obj << /Length 3742 /Subtype /XML /Type /Metadata >> stream application/pdfIEEE2024 IEEE MTT-S International Conference on Microwave Acoustics &amp; Mechanics (IC-MAM);2024; ; ;10.1109/IC-MAM60575.2024.10539019Analysis of Plate Acoustic Waves Resonance Properties Using Thin Plate of LiNbO<inf>3</inf>/SiCRF filtersResonatorsSurface acoustic wavesPlate acoustic wavesLiNbO3 (LN)Cubic silicon carbide3C-SiCNoriyuki WatanabeShoji Kakio 2024 IEEE MTT-S International Conference on Microwave Acoustics &amp; Mechanics (IC-MAM)3713 May 202410.1109/IC-MAM60575.2024.1053901940 VoR endstream endobj 5 0 obj << /Kids [7 0 R 9 0 R 10 0 R 11 0 R] /Type /Pages /Count 4 /ITXT (2.1.7) >> endobj 7 0 obj << /Contents [12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R 20 0 R 21 0 R] /Type /Page /Resources << /ColorSpace << /CS0 [/ICCBased 22 0 R] >> /ExtGState << /GS0 23 0 R >> /ProcSet [/PDF /Text /ImageB /ImageC /ImageI] /Font << /T1_0 24 0 R /T1_2 25 0 R /T1_1 26 0 R /Xi0 27 0 R /TT13 28 0 R /TT12 29 0 R /TT14 30 0 R /TT5 31 0 R /TT6 32 0 R /TT11 33 0 R /TT3 34 0 R /TT10 35 0 R /TT4 36 0 R /TT1 37 0 R /TT2 38 0 R /TT0 39 0 R /TT9 40 0 R /TT7 41 0 R /TT8 42 0 R /F20 43 0 R >> /XObject << /Im9 44 0 R /Im7 45 0 R /Im8 46 0 R /Im5 47 0 R /Im6 48 0 R /Im3 49 0 R /Im4 50 0 R /Im1 51 0 R /Im2 52 0 R /Im11 53 0 R /Im0 54 0 R /Im10 55 0 R >> >> /CropBox [0 0 595.29 841.89] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 595.29 841.89] >> endobj 8 0 obj << /Names [(9602-page1) 56 0 R (9602-page1bottom) 57 0 R (9602-page1height) 58 0 R (9602-page1top) 59 0 R] >> endobj 9 0 obj << /Contents [60 0 R 61 0 R 62 0 R] /Type /Page /Resources << /ColorSpace << /CS0 [/ICCBased 22 0 R] >> /ExtGState << /GS0 23 0 R >> /ProcSet [/PDF /Text /ImageC] /Font << /T1_0 63 0 R /TT13 40 0 R /TT12 29 0 R /TT5 64 0 R /TT6 65 0 R /TT11 35 0 R /TT3 66 0 R /TT10 28 0 R /TT4 67 0 R /TT1 39 0 R /TT2 30 0 R /TT0 42 0 R /TT9 33 0 R /TT7 68 0 R /TT8 69 0 R /F16 43 0 R >> /XObject << /Im3 70 0 R /Im1 71 0 R /Im2 72 0 R /Im0 73 0 R >> >> /CropBox [0 0 595.29 841.89] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 595.29 841.89] >> endobj 10 0 obj << /Contents [74 0 R 75 0 R 76 0 R] /Type /Page /Resources << /ColorSpace << /CS0 [/ICCBased 22 0 R] >> /ExtGState << /GS0 23 0 R >> /ProcSet [/PDF /Text /ImageC] /Font << /T1_0 77 0 R /TT5 34 0 R /TT6 33 0 R /TT3 66 0 R /TT4 67 0 R /TT1 39 0 R /TT2 30 0 R /TT0 42 0 R /TT9 29 0 R /TT7 35 0 R /TT8 28 0 R /F12 43 0 R >> /XObject << /Im7 70 0 R /Im5 78 0 R /Im6 72 0 R /Im3 79 0 R /Im4 80 0 R /Im1 81 0 R /Im2 82 0 R /Im0 83 0 R >> >> /CropBox [0 0 595.29 841.89] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 595.29 841.89] >> endobj 11 0 obj << /Contents [84 0 R 85 0 R 86 0 R] /Type /Page /Resources << /ColorSpace << /CS0 [/ICCBased 22 0 R] >> /ExtGState << /GS0 23 0 R >> /ProcSet [/PDF /Text /ImageC] /Font << /T1_0 87 0 R /TT5 39 0 R /TT6 40 0 R /TT3 35 0 R /TT4 40 0 R /TT1 33 0 R /TT2 28 0 R /TT0 42 0 R /TT9 67 0 R /TT7 66 0 R /TT8 30 0 R /F12 43 0 R >> /XObject << /Im3 88 0 R /Im1 89 0 R /Im2 90 0 R /Im0 91 0 R >> >> /CropBox [0 0 595.29 841.89] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 595.29 841.89] >> endobj 12 0 obj << /Length 10 /Filter /FlateDecode >> stream x+| endstream endobj 13 0 obj << /Length 1739 /Filter /FlateDecode >> stream HI4>"Ӵi4N;tpJop $xO 걟߾叇ݏSg5_:UlNI*C]Ed*K`-96{wzo夦i2j}}Ǡ@×po{76磂Nԥ ,ݮީ~0R5h=S{{>"oDb:ޙH5_heX+U hSshgaQk1 FEϒlh3kܲq3G̜~+ լ46A?*Niz n .G\"u=!#θnEH%m) [I I3HcP b@ @Ѡ,pf)OwcwnqaD0V5)bѴB;/zYoPE5.O 5 T0I|D/dx25 ޅS6muG 5wme'#Zn=g9Q\iHMXYeH|= PEA 6gZ y/}e[̋$&[ BMܫO3_"WU)5٧a{3KF?n[*}WS't@UK57/p[މnms+@w$:F\& vM]*VG&[4జ5%v{5W9쯚´ɪlI#g= *' n*~]3 bgY/ŬXa]#.};yw}@"z(F0=䳍8wVXJ?=wWw:c'&||u^oAjr˼pK_ c{"SqɢᇣF={VSa (fCGӐN =9ɑC„=nE:BCV&<8^ >IJy{MBT sId 9Ouڤ5#&ʋ鮻~v`$gFx,̪6%R2NҹJĶ(y/ Z>}p4\(@:/L}eNt2ab]n I<-A&B:4oy@^'b^>"1%SC# b_SqR#5O.cpџ 1 r  ŒR2vFɆ]_ $ endstream endobj 14 0 obj << /Length 1722 /Filter /FlateDecode >> stream HW7wF+p6!(cN~. .i|;eYZy3FkV ޚ1YK(6J߲`0}z#p+%V+^ @'ᑚz嗝 ^Ѣ B}Y0 X6nBqE,_@LMhéۣo>3"04/dFnn{E9M@9hy;+L@ۅ risi:gad`yW.*[63Y&B"ecy!D,&\m╔7v7wvhQۈƬ|jJo~qjPN mG`eviD m]TNpo"PF6֫$ R*O4Z3Mhk fZ8X a&8ƐI+׼G_ 4b*S9(Uh F]IhMBB|ifD虫zұ&, 1wO%T0)g4iARm`++"azª 2XK颃7K؛ ҃s8U%~3u`]- yK tD!'Jf/ ۓi{ wœv3)QղnO499Fk)<(2z' LS*Tr#d r)uRE*m;MPJo87q$|!Ӷ2PO8POyZԥ>#\kZB+O !m_#xbx]&$/$k:]DU̅E]"e`CxC!CnOr16A v!TؐKz[o)]t').y0X7K "& SKP:CE M `V`N L%wv$Ćxx&<`rCdZJ;TvG;j`F*lX{q5#q5D(lQ@X.IJuxÎtG}6sq(#jYfz]Ŵf׿w01"WA3f! fNy: e`i<&}Tti=yk0. t\aՌ.ܜpCZMtؤYbs0$>2;I@Ѥ"G=:OgM)o莣ؖ_Օ]LX1NFVcN<e]56TPKB ȏi$5zDz (JlF($w@^zN.kf2 endstream endobj 15 0 obj << /Length 1723 /Filter /FlateDecode >> stream HW˖D+ #˒\f p7Cj/jgv'\Oo 9Ş"[{+zT zp X90)T,:Ǥ0.NKX44Wɣ)QoHIw|WkqMwTQp֜-Am!(l;8 =%{"l@gy.vdp?xkAWVT>8]IܑS!zcW|v}̩-Rc !W0):@wL~z8L["]ܝVƔQhavdloŞ[\>ߍ*&/XvH!45͋81 M%-q T GSzj^:] i ecՙ}5Gl{OcFI{y0/11R99YoE.p@R|UvN2nUoFc"CMwqE&!,yp&' "K%JSU=+e6yR G|h\?k3Ap4uTfD-PgAD "O-->!aQ)$dUBM ob<Ïy Ob063\n2h\&ƗʑZ6i`<w&=UW$k(ԅ/YP$2DFҺKг]b8m 6ȁVp3&,6ғF_)v^Gf3ɓz]Ջ5`0zöۃ4\k%IP=uBuY gs Sr+o3M5.iOcWLc>wVɰ/\۱䨍ʇsUI,@skuqa9SF׊J9ΊRbȥp2{i>a$@򤣠u7D'NK endstream endobj 16 0 obj << /Length 1710 /Filter /FlateDecode >> stream HWKo6WRئ"@i=v^(I}9$=><}Խ¤sDdJ~K8zko]?m]>OΦ 7B4k?>TZID鞈80!劳SKP3>!M.a]@FrTau_b!J,LG JHEI JZAϲDµ3 nVmPxO>ao[t7Zb2f/$mth8>AYor|93FA fI>gs 9DVΕ<- ,Y0s59LDe(GI;U!M1Ź ݟ0(c kF9\iykڣLM EVc_1{QH&<{B![WLW) Ѡ[1^H yy<ȷi潕Hb[`Pl +C ;KϠ$`vL+N] /JKc\/NF~V: Xaqp;ؘsy )!ܣ{BGkmג(> ֻ`Ze@ K.;ۀMZ!"NqiNqBjP N^O $ ! 5^l} 9+ҏ؀إr*}Et/㚝,;r lra٘bY4ŵMm9A - qfQJUtɒLsQEw 1(/t#B8@Vw59g< +'Qh w5pѱ1[+ S!PAIfCYs 鷷Gd6̵GzT#d߿.NU.os3ihjVǍD*; 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