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application/pdfIEEE2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024; ; ;10.1109/IC-MAM60575.2024.10538491Evolution of SAW and BAW Devices Using Thin LiTaO<inf>3</inf> and LiNbO<inf>3</inf>SAWBAWSMRHALLiNbO3LiTaO3QuartzBondingShuji TanakaYong GuoMichio Kadota
2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)16913 May 202410.1109/IC-MAM60575.2024.10538491172
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