%PDF-1.4 % 1 0 obj <> endobj 2 0 obj <>stream application/pdf doi:10.1038/s41377-021-00584-9 High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics Chengli Wang Zhiwei Fang Ailun Yi Bingcheng Yang Zhe Wang Liping Zhou Chen Shen Yifan Zhu Yuan Zhou Rui Bao Zhongxu Li Yang Chen Kai Huang Jiaxiang Zhang Ya Cheng Xin Ou Springer US Light: Science & Applications, doi:10.1038/s41377-021-00584-9 10.1038/s41377-021-00584-9 http://dx.doi.org/10.1038/s41377-021-00584-9 journal Light: Science & Applications © 2021, The Author(s) 2047-7538 10.1038/s41377-021-00584-9 springer.com springerlink.com 2010-04-23 True 10.1038/s41377-021-00584-9 springer.com springerlink.com Springer 2021-07-05T09:07:50+02:00 2021-07-03T13:49:29+05:30 2021-07-05T09:07:50+02:00 True iText® 5.3.5 ©2000-2012 1T3XT BVBA (SPRINGER SBM; licensed version) VoR uuid:5a7cede4-8eb4-47f0-9a95-ebb238bf5bad uuid:b81d7abe-80cd-4815-8c82-5937c8a7bb28 default 1 converted uuid:3756ca78-a038-47da-b741-70109e952902 converted to PDF/A-2b pdfToolbox 2021-07-03T13:50:26+05:30 2 B Ya Cheng http://orcid.org/0000-0001-8269-5907 http://ns.adobe.com/pdf/1.3/ pdf Adobe PDF Schema internal A name object indicating whether the document has been modified to include trapping information Trapped Text http://ns.adobe.com/pdfx/1.3/ pdfx pdfx internal ID of PDF/X standard GTS_PDFXVersion Text internal Conformance level of PDF/X standard GTS_PDFXConformance Text internal Company creating the PDF Company Text internal Date when document was last modified SourceModified Text external Mirrors crossmark:CrosMarkDomains CrossMarkDomains Seq Text internal Mirrors crossmark:DOI doi Text http://ns.adobe.com/xap/1.0/mm/ xmpMM XMP Media Management Schema internal UUID based identifier for specific incarnation of a document InstanceID URI internal The common identifier for all versions and renditions of a document. 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