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/Subtype /XML /Type /Metadata >> stream application/pdfIEEEIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023;70;10;10.1109/TUFFC.2023.32829204H-Silicon Carbide as an Acoustic Material for MEMS4H-SiC4H-SiCOI4H-SiC high-aspect-ratio (HAR) deep reactive ion etching (DRIE)acoustic materialselastic anisotropyelastic constantsfrequency splitHAR DRIEhigh Q-factormechanical materialsmechanoacoustic materialmicroelectromechanical systems (MEMS)MEMS resonatorssilicon carbide (SiC)silicon carbide-on-insulator (SiCOI)smart cuttemperature coefficient of frequency (TCF)temperature coefficient of quality factor (TCQ)transverse isotropyYaoyao LongZhenming LiuFarrokh Ayazi IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control1189 Oct. 20231010.1109/TUFFC.2023.3282920701200 VoR endstream endobj 5 0 obj << /St 1189 /S /D >> endobj 6 0 obj << /Kids [10 0 R 11 0 R] /Type /Pages /Count 12 /ITXT (2.1.7) >> endobj 8 0 obj << /Contents [12 0 R 13 0 R 14 0 R 15 0 R 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