%PDF-1.4 % 1 0 obj <> endobj 2 0 obj <>stream application/pdf doi:10.1038/s44172-024-00234-z 4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation Zhenming Liu Yaoyao Long Charlotte Wehner Haoran Wen Farrokh Ayazi Springer US Communications Engineering, doi:10.1038/s44172-024-00234-z 10.1038/s44172-024-00234-z http://dx.doi.org/10.1038/s44172-024-00234-z journal Communications Engineering © 2024, The Author(s) 2731-3395 10.1038/s44172-024-00234-z springer.com springerlink.com 2010-04-23 True 10.1038/s44172-024-00234-z springer.com springerlink.com Springer 2024-06-25T12:39:04+02:00 2024-06-25T12:21:02+05:30 2024-06-25T12:39:04+02:00 True VoR uuid:3891a295-ba35-487c-bbbd-4dd54d689f70 uuid:c4855dda-a70c-4deb-ba88-3a5de82351e1 default 1 converted uuid:e2dbf8cc-df04-4eb9-91b0-60d9861af390 converted to PDF/A-2b pdfToolbox 2024-06-25T12:21:48+05:30 2 B Zhenming Liu http://orcid.org/0000-0001-5196-035X http://ns.adobe.com/xap/1.0/mm/ xmpMM XMP Media Management Schema internal UUID based identifier for specific incarnation of a document InstanceID URI internal The common identifier for all versions and renditions of a document. 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