%PDF-1.5
%
1 0 obj
<<
/OpenAction 2 0 R
/PageMode /UseNone
/PageLayout /OneColumn
/Metadata 3 0 R
/StructTreeRoot 4 0 R
/Type /Catalog
/MarkInfo <<
/Marked true
>>
/Pages 5 0 R
/ViewerPreferences <<
/DisplayDocTitle false
>>
>>
endobj
6 0 obj
<<
/Meeting#20Starting#20Date (21 Jan. 2024)
/Creator (Certified by IEEE PDFeXpress at November 21, 2023 18:49:36 )
/ModDate (D:20240220102702-05'00')
/IEEE#20Article#20ID (10439591)
/CreationDate (D:20240216155729-05'00')
/IEEE#20Issue#20ID (10439292)
/Subject (2024 IEEE 37th International Conference on Micro Electro Mechanical Systems \(MEMS\);2024; ; ;10.1109/MEMS58180.2024.10439591)
/SourceModified (D:20231121182407)
/IEEE#20Publication#20ID (10439241)
/Title (A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression)
/Meeting#20Ending#20Date (25 Jan. 2024)
/Producer <41646F626520504446204C6962726172792032302E362E36363B206D6F646966696564207573696E67206954657874AE20436F726520372E322E3420284147504C2076657273696F6E2920A9323030302D323032322069546578742047726F7570204E56>
/Company (dna graphics)
>>
endobj
2 0 obj
<<
/S /GoTo
/D [7 0 R /Fit]
>>
endobj
3 0 obj
<<
/Length 3990
/Subtype /XML
/Type /Metadata
>>
stream
application/pdfIEEE2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024; ; ;10.1109/MEMS58180.2024.10439591A Dispersion-Engineered YX-LN/SIO<inf>2</inf>/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode SuppressionAcoustic resonatorsurface acoustic waveshear horizontal (SH) modeRayleigh modelithium niobatedispersion engineeringelectromechanical couplingTzu-Hsuan HsuZhi-Qiang LeeChia-Hsien TsaiVakhtang ChulukhadzeCheng-Chien LinYa-Ching YuRuochen LuMing-Huang Li
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)2721 Jan. 202410.1109/MEMS58180.2024.1043959130
VoR
endstream
endobj
4 0 obj
<<
/RoleMap 8 0 R
/Type /StructTreeRoot
/K 9 0 R
/ParentTree 10 0 R
/ParentTreeNextKey 27
>>
endobj
5 0 obj
<<
/Kids [7 0 R 11 0 R 12 0 R 13 0 R]
/Type /Pages
/Count 4
/ITXT (2.1.7)
>>
endobj
7 0 obj
<<
/Group 14 0 R
/Contents [15 0 R 16 0 R 17 0 R]
/Type /Page
/Resources <<
/ExtGState <<
/GS4 18 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI /ImageB]
/Font <<
/TT5 19 0 R
/TT6 19 0 R
/TT3 20 0 R
/TT4 21 0 R
/C2_2 22 0 R
/TT1 23 0 R
/C2_1 24 0 R
/TT2 25 0 R
/TT0 26 0 R
/C2_0 27 0 R
/F1 28 0 R
/TT7 19 0 R
/F13 29 0 R
>>
/XObject <<
/Im17 30 0 R
/Im16 31 0 R
/Im19 32 0 R
/Im18 33 0 R
/Im1 34 0 R
/Im2 35 0 R
/Im11 36 0 R
/Im0 37 0 R
/Im10 38 0 R
/Im13 39 0 R
/Im12 40 0 R
/Im15 41 0 R
/Im14 42 0 R
/Im9 43 0 R
/Im7 44 0 R
/Im8 45 0 R
/Im5 46 0 R
/Im6 47 0 R
/Im3 48 0 R
/Im4 49 0 R
>>
>>
/CropBox [0 0 594.72 841.68]
/Parent 5 0 R
/StructParents 0
/Rotate 0
/MediaBox [0 0 594.72 841.68]
>>
endobj
8 0 obj
<<
/Annotation /Span
/Subscript /Span
/DropCap /Figure
/TextBox /Art
/Underline /Span
/Outline /Span
/Artifact /P
/Superscript /Span
/Endnote /Note
/RT /Span
/Ruby /Span
/Diagram /Figure
/Strikeout /Span
/Footnote /Note
/Bibliography /BibEntry
/Chart /Figure
/InlineShape /Figure
/RB /Span
>>
endobj
9 0 obj
<<
/P 4 0 R
/S /Sect
/K [50 0 R 51 0 R 52 0 R 53 0 R 54 0 R 55 0 R 56 0 R 57 0 R 58 0 R 59 0 R
60 0 R 61 0 R 62 0 R 63 0 R 64 0 R 65 0 R 66 0 R 67 0 R 68 0 R 69 0 R
70 0 R 71 0 R 72 0 R 73 0 R 74 0 R 75 0 R 76 0 R 77 0 R 78 0 R 79 0 R
80 0 R 81 0 R 82 0 R 83 0 R 84 0 R 85 0 R 86 0 R 87 0 R 88 0 R 89 0 R
90 0 R 91 0 R 92 0 R 93 0 R 94 0 R 95 0 R 96 0 R 97 0 R 98 0 R 99 0 R
100 0 R 101 0 R 102 0 R 103 0 R 104 0 R]
>>
endobj
10 0 obj
<<
/Nums [0 [50 0 R 51 0 R 52 0 R 53 0 R 54 0 R 55 0 R 57 0 R 58 0 R 59 0 R 60 0 R
61 0 R 62 0 R 63 0 R 105 0 R 63 0 R 106 0 R 63 0 R 107 0 R 63 0 R 108 0 R
63 0 R 109 0 R 63 0 R 64 0 R 110 0 R 64 0 R 65 0 R 111 0 R 65 0 R 112 0 R
65 0 R 66 0 R 113 0 R 66 0 R 114 0 R null 115 0 R 66 0 R 67 0 R 68 0 R
69 0 R 70 0 R 116 0 R null 117 0 R null 56 0 R]
1 105 0 R 2 106 0 R 3 107 0 R 4 108 0 R
5 109 0 R 6 110 0 R 7 111 0 R 8 112 0 R 9 113 0 R
10 114 0 R 11 115 0 R 12 [71 0 R 118 0 R 71 0 R 119 0 R 71 0 R 74 0 R 75 0 R 76 0 R 77 0 R 78 0 R
120 0 R 78 0 R 79 0 R 80 0 R 121 0 R 80 0 R 81 0 R 82 0 R 83 0 R 122 0 R
null 123 0 R null 124 0 R null 125 0 R null 72 0 R 73 0 R]
13 118 0 R 14 119 0 R
15 120 0 R 16 121 0 R 17 [126 0 R 127 0 R 126 0 R 87 0 R 128 0 R 87 0 R 88 0 R 129 0 R 88 0 R 130 0 R
88 0 R 131 0 R null 132 0 R null 133 0 R 88 0 R 134 0 R 88 0 R 89 0 R
90 0 R 91 0 R 135 0 R null 136 0 R null 137 0 R null 138 0 R null
139 0 R null 140 0 R null 84 0 R 85 0 R 86 0 R]
18 127 0 R 19 128 0 R
20 129 0 R 21 130 0 R 22 131 0 R 23 132 0 R 24 133 0 R
25 134 0 R 26 [91 0 R 92 0 R 93 0 R 95 0 R 96 0 R 97 0 R 98 0 R 99 0 R 100 0 R null
null 141 0 R null null null 142 0 R null null null 143 0 R
null null null 144 0 R null null null 145 0 R null null
null 146 0 R null null null 147 0 R null null null 148 0 R
null null null 149 0 R null null null 150 0 R null null
null 151 0 R null null null 152 0 R null null null 153 0 R
null null null 154 0 R null null null 155 0 R null null
102 0 R 103 0 R 104 0 R 156 0 R null 157 0 R null 94 0 R]
]
>>
endobj
11 0 obj
<<
/Group 14 0 R
/Contents [158 0 R 159 0 R 160 0 R 161 0 R 162 0 R 163 0 R]
/Type /Page
/Resources <<
/ExtGState <<
/GS0 164 0 R
/NxGS0 165 0 R
>>
/Font <<
/TT5 166 0 R
/TT3 167 0 R
/TT4 21 0 R
/C2_2 168 0 R
/TT1 26 0 R
/C2_1 24 0 R
/TT2 25 0 R
/C2_4 169 0 R
/C2_3 22 0 R
/TT0 20 0 R
/NxF0 19 0 R
/C2_0 27 0 R
/F13 29 0 R
>>
>>
/CropBox [0 0 594.72 841.68]
/Parent 5 0 R
/StructParents 12
/Rotate 0
/MediaBox [0 0 594.72 841.68]
>>
endobj
12 0 obj
<<
/Group 14 0 R
/Contents [170 0 R 171 0 R 172 0 R 173 0 R 174 0 R 175 0 R]
/Type /Page
/Resources <<
/ColorSpace <<
/CS0 [/Indexed /DeviceRGB 197 176 0 R]
>>
/ExtGState <<
/GS0 177 0 R
/NxGS0 165 0 R
>>
/Font <<
/TT5 166 0 R
/TT3 26 0 R
/TT4 21 0 R
/C2_2 168 0 R
/TT1 25 0 R
/C2_1 27 0 R
/TT2 167 0 R
/C2_4 22 0 R
/C2_3 169 0 R
/TT0 20 0 R
/NxF0 19 0 R
/C2_0 24 0 R
/F13 29 0 R
>>
/XObject <<
/Im0 178 0 R
>>
>>
/CropBox [0 0 594.72 841.68]
/Parent 5 0 R
/StructParents 17
/Rotate 0
/MediaBox [0 0 594.72 841.68]
>>
endobj
13 0 obj
<<
/Contents [179 0 R 180 0 R 181 0 R 182 0 R 183 0 R 184 0 R]
/Type /Page
/Resources <<
/ExtGState <<
/NxGS0 165 0 R
>>
/Font <<
/TT5 21 0 R
/TT6 166 0 R
/TT3 26 0 R
/TT4 185 0 R
/C2_2 22 0 R
/TT1 25 0 R
/C2_1 24 0 R
/TT2 167 0 R
/TT0 20 0 R
/NxF0 19 0 R
/C2_0 27 0 R
/F12 29 0 R
>>
>>
/CropBox [0 0 594.72 841.68]
/Parent 5 0 R
/StructParents 26
/Rotate 0
/MediaBox [0 0 594.72 841.68]
>>
endobj
14 0 obj
<<
/S /Transparency
/CS /DeviceRGB
>>
endobj
15 0 obj
<<
/Length 10
/Filter /FlateDecode
>>
stream
x+ |
endstream
endobj
16 0 obj
<<
/Length 15001
/Filter /FlateDecode
>>
stream
HWmo8_+D
X,&MiMkNTʦvP2%KvEјș<__S~ud~4IS#W~Obq$MSǫB%֚6~MiRG_R%Et}DDWVe?1+o;
d!R2nmk1B7=/^1tt*ڲF[#
EK8MYK r
ZIo7y؎:}"464cQqxԛ3Nk~b<%Iۋ|u2:>[5Ȃ`(p\T%rhH3:6Le\whXxf295VE_ⱌ6r'EeIi[@6; yIگ:''hCP#u2 L8NJn;NDOr%.2EJ)(Av T]G ZWSK\Da3-ۡe֍O,'Pw/ϦmyCfX4oCI;B-Z
8A1r؆LINwrP&- 7,-'8Թ(8r'L7igL)Pw [1Wө#T:1+(ӺyHCedqꐃ5 euimSJJɸ@)Ӿl;VD,QUP)
THUT"2@p7*W̆Gpv'I{:
`mo\ۖM1n^