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4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation
Zhenming Liu
Yaoyao Long
Charlotte Wehner
Haoran Wen
Farrokh Ayazi
Springer US
Communications Engineering, doi:10.1038/s44172-024-00234-z
10.1038/s44172-024-00234-z
http://dx.doi.org/10.1038/s44172-024-00234-z
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Communications Engineering
© 2024, The Author(s)
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