%PDF-1.4 % 1 0 obj << /Names 2 0 R /Metadata 3 0 R /Type /Catalog /PageLabels 4 0 R /Pages 5 0 R >> endobj 6 0 obj << /Creator (Aspose Ltd.) /ModDate (D:20220713142634-04'00') /IEEE#20Article#20ID (9798764) /CreationDate (D:20220704120423+05'30') /IEEE#20Issue#20ID (9829891) /Producer <4173706F73652E50646620666F72202E4E455420382E332E303B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29> /Subject (IEEE Sensors Journal;2022;22;14;10.1109/JSEN.2022.3181046) /IEEE#20Publication#20ID (7361) /Title (MEMS Thermocouple Sensor Based on 4H-Silicon-Carbide-On-Insulator \(4H-SiCOI\)) >> endobj 2 0 obj << /EmbeddedFiles 7 0 R >> endobj 3 0 obj << /Length 3614 /Subtype /XML /Type /Metadata >> stream application/pdfIEEEIEEE Sensors Journal;2022;22;14;10.1109/JSEN.2022.3181046MEMS Thermocouple Sensor Based on 4H-Silicon-Carbide-On-Insulator (4H-SiCOI)4H-SiCOIfabricationheat detectionMEMSYudong LvAilun YiYi WangHong ZhouXin OuTie Li IEEE Sensors Journal1393015 July15, 20221410.1109/JSEN.2022.31810462213936 VoR endstream endobj 4 0 obj << /Nums [0 8 0 R] >> endobj 5 0 obj << /Kids [9 0 R 10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R] /Type /Pages /Count 7 /ITXT (2.1.7) >> endobj 7 0 obj << /Kids [16 0 R] >> endobj 8 0 obj << /S /D >> endobj 9 0 obj << /Contents [17 0 R 18 0 R 19 0 R] /Thumb 20 0 R /Type /Page /Resources 21 0 R /Annots [22 0 R 23 0 R 24 0 R] /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 10 0 obj << /Contents [25 0 R 26 0 R 27 0 R] /Thumb 28 0 R /Type /Page /Resources 29 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 11 0 obj << /Contents [30 0 R 31 0 R 32 0 R] /Thumb 33 0 R /Type /Page /Resources 34 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 12 0 obj << /Contents [35 0 R 36 0 R 37 0 R] /Thumb 38 0 R /Type /Page /Resources 39 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 13 0 obj << /Contents [40 0 R 41 0 R 42 0 R] /Thumb 43 0 R /Type /Page /Resources 44 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 14 0 obj << /Contents [45 0 R 46 0 R 47 0 R] /Thumb 48 0 R /Type /Page /Resources 49 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 15 0 obj << /Contents [50 0 R 51 0 R 52 0 R] /Thumb 53 0 R /Type /Page /Resources 54 0 R /CropBox [0 0 612 792] /Parent 5 0 R /Rotate 0 /MediaBox [0 0 612 792] >> endobj 16 0 obj << /Names [ 55 0 R] /Limits [ ] >> endobj 17 0 obj << /Length 10 /Filter /FlateDecode >> stream x+| endstream endobj 18 0 obj << /Length 12054 /Filter /FlateDecode >> stream x}]sǕ=oj%BӟӳYGRy-+x A@ʯӃEdߋTELO>䇓}Nv'~{7ԝ<Ӿ 崕˴ϧ]}lI{zurN6ӷs)xҸЇvrއ #}]䬛㳴mzr|=i_hWOm}5]vC_OBjb?}5qm"/ƷO=}ɋv6nN~8!N:sVa+ w|s򇓧7z3wdw=$Vۥdƒ5R"@" e h9FXjQ~$EQlڢ,F pEf:Kg'Jg@ {pزS*:<te;nP'($%#+ʆuc 2_7="r(d,zg6r*rD1Dziu+OK6dE2@)1V9g 2 E##eEԕ_tja~jQp'sJ)YAQvZ*d91$gṴ2)aLE! 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