%PDF-1.4
%
1 0 obj
<<
/Names 2 0 R
/Metadata 3 0 R
/Type /Catalog
/PageLabels 4 0 R
/Pages 5 0 R
>>
endobj
6 0 obj
<<
/Creator (Aspose Ltd.)
/ModDate (D:20220713142634-04'00')
/IEEE#20Article#20ID (9798764)
/CreationDate (D:20220704120423+05'30')
/IEEE#20Issue#20ID (9829891)
/Producer <4173706F73652E50646620666F72202E4E455420382E332E303B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/Subject (IEEE Sensors Journal;2022;22;14;10.1109/JSEN.2022.3181046)
/IEEE#20Publication#20ID (7361)
/Title (MEMS Thermocouple Sensor Based on 4H-Silicon-Carbide-On-Insulator \(4H-SiCOI\))
>>
endobj
2 0 obj
<<
/EmbeddedFiles 7 0 R
>>
endobj
3 0 obj
<<
/Length 3614
/Subtype /XML
/Type /Metadata
>>
stream
application/pdfIEEEIEEE Sensors Journal;2022;22;14;10.1109/JSEN.2022.3181046MEMS Thermocouple Sensor Based on 4H-Silicon-Carbide-On-Insulator (4H-SiCOI)4H-SiCOIfabricationheat detectionMEMSYudong LvAilun YiYi WangHong ZhouXin OuTie Li
IEEE Sensors Journal1393015 July15, 20221410.1109/JSEN.2022.31810462213936
VoR
endstream
endobj
4 0 obj
<<
/Nums [0 8 0 R]
>>
endobj
5 0 obj
<<
/Kids [9 0 R 10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R]
/Type /Pages
/Count 7
/ITXT (2.1.7)
>>
endobj
7 0 obj
<<
/Kids [16 0 R]
>>
endobj
8 0 obj
<<
/S /D
>>
endobj
9 0 obj
<<
/Contents [17 0 R 18 0 R 19 0 R]
/Thumb 20 0 R
/Type /Page
/Resources 21 0 R
/Annots [22 0 R 23 0 R 24 0 R]
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
10 0 obj
<<
/Contents [25 0 R 26 0 R 27 0 R]
/Thumb 28 0 R
/Type /Page
/Resources 29 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
11 0 obj
<<
/Contents [30 0 R 31 0 R 32 0 R]
/Thumb 33 0 R
/Type /Page
/Resources 34 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
12 0 obj
<<
/Contents [35 0 R 36 0 R 37 0 R]
/Thumb 38 0 R
/Type /Page
/Resources 39 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
13 0 obj
<<
/Contents [40 0 R 41 0 R 42 0 R]
/Thumb 43 0 R
/Type /Page
/Resources 44 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
14 0 obj
<<
/Contents [45 0 R 46 0 R 47 0 R]
/Thumb 48 0 R
/Type /Page
/Resources 49 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
15 0 obj
<<
/Contents [50 0 R 51 0 R 52 0 R]
/Thumb 53 0 R
/Type /Page
/Resources 54 0 R
/CropBox [0 0 612 792]
/Parent 5 0 R
/Rotate 0
/MediaBox [0 0 612 792]
>>
endobj
16 0 obj
<<
/Names [ 55 0 R]
/Limits [ ]
>>
endobj
17 0 obj
<<
/Length 10
/Filter /FlateDecode
>>
stream
x+ |
endstream
endobj
18 0 obj
<<
/Length 12054
/Filter /FlateDecode
>>
stream
x}]sǕ=oj%BӟӳYGRy-+x A@ʯӃEdߋTELO>䇓}Nv'~{7ԝ<Ӿ崕˴ϧ]}lI{zurN6ӷs)xҸЇvrއ #}]䬛㳴mzr|=i_hWOm}5]vC_OBjb?}5qm"/ƷO=}ɋv6nN~8!N:sVa + w|s7z3wdw