%PDF-1.6 % 1 0 obj << /OutputIntents [2 0 R] /Metadata 3 0 R /Lang (de-DE) /StructTreeRoot 4 0 R /Type /Catalog /MarkInfo << /Marked true >> /OCProperties << /OCGs [5 0 R] /D << /Order [] /RBGroups [] >> >> /Pages 6 0 R /ViewerPreferences 7 0 R >> endobj 8 0 obj << /Meeting#20Starting#20Date (31 Oct. 2021) /Creator (Certified by IEEE PDFeXpress at September 4, 2021 01:06:57 ) /ModDate (D:20211216092838-05'00') /IEEE#20Article#20ID (9639506) /CreationDate (D:20211206230231-05'00') /IEEE#20Issue#20ID (9639235) /Producer <4D6963726F736F6674AE20576F726420323031393B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29> /Subject (2021 IEEE Sensors;2021; ; ;10.1109/SENSORS47087.2021.9639506) /IEEE#20Publication#20ID (9639447) /Title (Piezoresistive 4H-Silicon Carbide \(SiC\) pressure sensor) /Meeting#20Ending#20Date (3 Nov. 2021) >> endobj 2 0 obj << /Info (Creator: HP Manufacturer:IEC Model:sRGB) /S /GTS_PDFA1 /Type /OutputIntent /RegistryName (http://www.color.org) /DestOutputProfile 9 0 R /OutputConditionIdentifier (sRGB) >> endobj 3 0 obj << /Length 3642 /Subtype /XML /Type /Metadata >> stream application/pdfIEEE2021 IEEE Sensors;2021; ; ;10.1109/SENSORS47087.2021.9639506Piezoresistive 4H-Silicon Carbide (SiC) pressure sensorPiezoresistive4H Silicon CarbideSiCPressure SensorHigh TemperaturePiotr MackowiakKolja ErbacherManuel BaeuscherMichael SchifferKlaus-Dieter LangMartin Schneider-RamelowHa-Duong Ngo 2021 IEEE Sensors131 Oct. 202110.1109/SENSORS47087.2021.96395064 VoR endstream endobj 4 0 obj << /RoleMap 10 0 R /Type /StructTreeRoot /K [11 0 R] /ParentTree 12 0 R /ParentTreeNextKey 4 >> endobj 5 0 obj << /Name (Headers/Footers) /Usage << /PageElement << /Subtype /HF >> >> /Type /OCG >> endobj 6 0 obj << /Kids [13 0 R 14 0 R 15 0 R 16 0 R] /Type /Pages /Count 4 /ITXT (2.1.7) >> endobj 7 0 obj << /DisplayDocTitle true >> endobj 9 0 obj << /Length 2593 /Filter /FlateDecode /N 3 >> stream xwTTϽwz0tzRWQf "*QD)  EbE Q{@QldFJ|yy=gs{ߵ.$/?./ '{#~<s P +=KE$^o{4+/ 6'%<2YSS %(by1'.gEv3;8 v[="ޑ-q~6#"JqEVaf"+If"&C]E) \3IKnnkˠ{qrR9q iLY2EE6601PuoJEzg_f : !$E}k>4$ v999&\D\?xCw$0nt!dqys8|O.2./Qn+\j? 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