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application/pdfIEEE2021 IEEE Sensors;2021; ; ;10.1109/SENSORS47087.2021.9639506Piezoresistive 4H-Silicon Carbide (SiC) pressure sensorPiezoresistive4H Silicon CarbideSiCPressure SensorHigh TemperaturePiotr MackowiakKolja ErbacherManuel BaeuscherMichael SchifferKlaus-Dieter LangMartin Schneider-RamelowHa-Duong Ngo
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