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doi:10.1016/j.optmat.2020.109990
Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices
Ailun Yi
Yi Zheng
Hao Huang
Jiajie Lin
Youquan Yan
Tiangui You
Kai Huang
Shibin Zhang
Chen Shen
Min Zhou
Wei Huang
Jiaxiang Zhang
Shengqiang Zhou
Haiyan Ou
Xin Ou
4H-silicon carbide-on-insulator platform
Wafer-scale
Ion-cutting and layer transferring
Surface blistering
Nonlinear optical device
Optical Materials, Journal Pre-proof, 109990. doi:10.1016/j.optmat.2020.109990
Elsevier B.V.
journal
Optical Materials
© 2020 Published by Elsevier B.V.
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https://doi.org/10.1016/j.optmat.2020.109990
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