SAB9510--Fully automatic cluster plasma TRIM machine
| Wafer size | ≤8 inch |
Loading mode | Cassette automatic loading and unloading |
Wafer calibration | Aligner |
Removal efficiency | 800 Å*cm²/s @Si |
Supported process gases | Ar/SF6/O2/HeOr other mixed gases |
Beam intensity | >100μA @Ar |
Beam spot size | FWHM＜5mm |
Cluster ion energy | 20/60keV |
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
+86 188 233 40140
9:00-18:00 Sales Service Hotline
Inquiry, cooperation consultation email
Whatsapp / Phone
+86 188 233 40140
