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LPCVD

Processing capabilities:

Material: 

SiO2 (silicon oxide), 

Si3N4 (silicon nitride)

        Application:Low Stress Silicon Nitride and Low Loss Si3N4 (Silicon Nitride)

Poly Si (polycrystalline silicon), 

       Wafer Size: 6 inch

       Wafer Thickness: 500 -750um

       DepoSition thickness :0-1.3um

       Processed Wafer Types: Silicon Wafer

TEOS SiO2 (tetraethoxysilane)

Size: 2-12 inches

Equipment capacity: 25 pieces per furnace, 50 pieces per furnace




About Us

OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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