PZT film is a material with a super strong electro-optical effect, and its electro-optical coefficient is 6 times that of LiNbO3. At the same time, PZT has nonlinear effect, acousto-optic effect, and piezoelectric effect.
If you are interested in this material ,and want to know its application, please see the following paper,After you see all the paper and you will know which kind of wafer do you need and which application you can do :
PZT photonic materials and devices platform.pdf
Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves.pdf
Photonic integration based on a ferroelectric thin film platform.pdf
Integrated electro-optic modulator on lead zirconate.pdf
Highly efficient lead zirconate titanate ring modulator.pdf
Broadband PZT electro-optic modulator.pdf
200 GBd Electro-optic PLZT Modulator.pdf
* Application :
electro-optic modulators
optical switches
optical gyroscopes
acousto-optic devices
optical MEMS
Spec:
PZT:300nm or other thickness
Sio2:2um 5um or other thickness
Si 525um
The quasi-single crystal form not only has good light transmittance, but more importantly, it has a super strong electro-optical effect.
* All the "electro-optic coefficients" in the table are measured values in the electro-optic modulator
* The relationship between the modulator drive voltage Vπ, power consumption P and electro-optic coefficient r: Vπ ∝ 1/r, P ∝ 1/ r2
* PZT has a large light transmission range and can be used in AR/VR and visible light radar, which is impossible with silicon
* Provide device etching foundry
*Provide polarization foundry or a complete set of polarization equipment and processes Provide optoelectronic chip design services
*Photolithography → Etching → Liftoff Electrode
*The processed modulator can obtain the strongest electro-optic effect after DC electric field polarization (electro-optic coefficient ~200 pm/V)
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
