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PZTOI Wafer

PZT film is a material with a super strong electro-optical effect, and its electro-optical coefficient is 6 times that of LiNbO3. At the same time, PZT has nonlinear effect, acousto-optic effect, and piezoelectric effect.

If you are interested in this material ,and want to know its application, please see the following paper,After you see all the paper and you will know which kind of wafer do you need and which application you can do :

PZT_Optical_Memristors(3).pdf

Reversible and Tunable Second-Order Nonlinear Optical Susceptibility in PZT Thin Films for Integrated Optics.pdf

PZT photonic materials and devices platform.pdf

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves.pdf

Photonic integration based on a ferroelectric thin film platform.pdf

Integrated electro-optic modulator on lead zirconate.pdf

High-temperature-resistant silicon-polymer hybrid modulator operating at up to 200 Gbit s−1 for energy-efficient datacentres and harsh-environment applications.pdf

Highly efficient lead zirconate titanate ring modulator.pdf

Broadband PZT electro-optic modulator.pdf

200 GBd Electro-optic PLZT Modulator.pdf


* Application :

electro-optic modulators

optical switches

optical gyroscopes

acousto-optic devices

optical MEMS

Spec:

PZT:300nm or other thickness

Sio2:2um 5um or other thickness

Si 525um

PZTOI( Lead Zirconate Titanate On insulator)Wafer

thin film PZT wafer

The quasi-single crystal form not only has good light transmittance, but more importantly, it has a super strong electro-optical effect.


Comparison of PZT/BTO/LN/SI

* All the "electro-optic coefficients" in the table are measured values in the electro-optic modulator

* The relationship between the modulator drive voltage Vπ, power consumption P and electro-optic coefficient r: Vπ ∝ 1/r, P ∝ 1/ r2

* PZT has a large light transmission range and can be used in AR/VR and visible light radar, which is impossible with silicon

Device Fabrication


PZTOI device fabrication

* Provide device etching foundry

*Provide polarization foundry or a complete set of polarization equipment and processes Provide optoelectronic chip design services

*Photolithography → Etching → Liftoff Electrode

*The processed modulator can obtain the strongest electro-optic effect after DC electric field polarization (electro-optic coefficient ~200 pm/V)

Application example: High-speed modulator based on PZT thin film

Ring Modulator--


Nanobeam-

Nanobeam-


MZ-Modulator-bandwidth=70 GHz,VπL=0.7

MZ-Modulator-bandwidth=70 GHz,VπL=0.7



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OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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