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PZTOI Wafer

PZT film is a material with a super strong electro-optical effect, and its electro-optical coefficient is 6 times that of LiNbO3. At the same time, PZT has nonlinear effect, acousto-optic effect, and piezoelectric effect.

* Application :

electro-optic modulators

optical switches

optical gyroscopes

acousto-optic devices

optical MEMS

Spec:

PZT:300nm or other thickness

Sio2:2um 5um or other thickness

Si 525um

PZTOI( Lead Zirconate Titanate On insulator)Wafer

thin film PZT wafer

The quasi-single crystal form not only has good light transmittance, but more importantly, it has a super strong electro-optical effect.


Comparison of PZT/BTO/LN/SI

* All the "electro-optic coefficients" in the table are measured values in the electro-optic modulator

* The relationship between the modulator drive voltage Vπ, power consumption P and electro-optic coefficient r: Vπ ∝ 1/r, P ∝ 1/ r2

* PZT has a large light transmission range and can be used in AR/VR and visible light radar, which is impossible with silicon

Device Fabrication


PZTOI device fabrication

* Provide device etching foundry

*Provide polarization foundry or a complete set of polarization equipment and processes Provide optoelectronic chip design services

*Photolithography → Etching → Liftoff Electrode

*The processed modulator can obtain the strongest electro-optic effect after DC electric field polarization (electro-optic coefficient ~200 pm/V)

Application example: High-speed modulator based on PZT thin film

Ring Modulator--


Nanobeam-

Nanobeam-


MZ-Modulator-bandwidth=70 GHz,VπL=0.7

MZ-Modulator-bandwidth=70 GHz,VπL=0.7



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About Us

OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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