Acoustic grade lithium tantalate wafers
Surface-wave level congruent lithium tanta late wafers (Congruent LiTaO3; CLT)
| Tangential | Y36°-X ；Y42°-X ；X-Y112°；X-Z ；Z-X and customization | |||
Diameter | 76.2±0.2mm | 100.0±0.2mm | 150.0±0.2mm | |
PF length | 22±2mm | 32±2mm | 47.5±2mm | |
Curie temperature | 603±2℃，605±2℃ | |||
SF length | Depending on customer requirements | |||
Thicknesses | 180~250±20μm, 350±20μm, 500±20μm，customized | |||
WARP | <25μm | |||
BOW | -25μm<BOW<25μm | |||
TTV | <5μm | |||
PLTV（LTV<1μm) | >95%(5mm*5mm) | |||
| Positive Roughness (Ra) | <1nm | |||
| Backside Roughness (Ra) | GC80#，GC120#，GC240#，GC320#，GC1000#,GC2000#and customized | |||
| Number of surface defects (diameter＜0.3μm) | <500 | |||
| Conductivity(Ω- ·1 cm) | Blackened:1×10 -11 -1×10 -12 | No blackened:1×10 -15 -1×10 -16 | ||
| ApplicationAreas | Surface acoustic wave device (SAW | |||
Acoustic surface wave levels of congruent lithium tantalate wafers (Congruent LiTaO acoustic basic3; CLT) performance index:
| tangential | X | Y36° | Y42° | |
wavedirection | Y112° | X | X | |
Electromechanicalcouplingcoefficient(%) | 0.70 | 6.0 | 7.6 | |
Temperaturefrequencycoefficient(ppm/°C) | -18 | -32 | -40 | |
SurfaceAcousticWaveVelocity(m/s) | 3300 | 4112 | 4022 | |
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
