Equipment name: Deep reactive plasma etching system
Brand model: SPTS Omega LPX Rapier
Main function: Etching various silicon-based materials, especially suitable for etching processes with high aspect ratios
Size: Maximum 8 inches
Deepth:600um at most
Display:
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
+86 188 233 40140
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+86 188 233 40140