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Use PECVD Method Deposite Silicon Nitride on Three different kinds of Wafer

Date: 2024-10-24 08:15:07     Hits: 29

Official Website: https://en.omedasemi.com/

Email: jing.chen@omeda-optics.com

in this article , we will share three project about deposition silicon nitride on three kind of wafer ,the deposition process is PECVD(Plasma Enhanced Chemical Vaporation Deposition)

Project 1:PECVD Silicon Nitride on Silicon Wafer

Project 2:PECVD Silicon Nitride on Glass Wafer

Project 3:PECVD Silicon Nitride on Theraml Oxide Wafer

Project4:PECVD Silicon Nitride+SiO2 on Silicon Wafer

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OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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