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Theraml Oxide SIlicon Wafer

OMedaSemi provides stock and custom processing of thermal oxide wafer . Our featured products are thin film thermal oxide wafer and thick film thermal oxide wafer . Our thickest thermal oxide sheet is 15um, and the thinnest is 50nm.


SIZE:4inch 6inch 8inch

Thickness of Oxide Layer :50nm-15um

General deposit Method:LPCVD Furnace Wet Oxidation(100pcs/Chamber 50Pcs/Chamber 25Pcs/Chamber)

Lead Time:7days

Application:PIC,MEMS,SAW

Substrate:Clients can specify the silicon wafer ,and we do the oxidation process 


Our Innovation :Ultra-Flat-thermal Oxide-Wafer-TTV<500nmm

Also we have capbllity to fabricate the TTV<500nm silicon wafer in 6inch size,if you can interested in them ,we can fabricated ultra flat 8inch thermal oxide silicon wafer for you


Our  stock

6 inches

Low resistivity 1-100 resistivity

1um thermal oxide wafer 

2um thermal oxide wafer 

3um thermal oxide wafer  (SICOI SINOI)

8um thermal oxide wafer 

10um thermal oxide wafer 

15um thermal oxide wafer  (applied to silicon nitride optical waveguide gyroscope, ultra-high aspect ratio thin film low loss optical waveguide)

High resistance thermal oxide wafer  (>10000 Oh*m)

4.7um thermal oxide wafer  (LNOI LTOI and other electro-optic modulators)

8 inches

High resistance thermal oxide wafer (>10000 Oh*m)

4.7um thermal oxide sheet (LNOI LTOI and other electro-optic modulators)

8.2um thermal oxide sheet (LNOI LTOI and other electro-optic modulators)

Customized  Thermal Oxide Wafer 

At the same time, we can also provide low-cost and fast customized thermal oxide wafer services,4inch  6-inch 8-inch equipment, 100 wafers per furnace, high efficiency and low cost



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About Us

OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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