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PECVD Si3N4 (SIlicon Nitride) on Glass(BF33 JGS1 Quartz Fused Silica)

Date: 2024-10-11 09:23:07     Hits: 63

Today  i want to share our project with you "PECVD Silicon Nitride on Glass Wafer "



As you know SiN is also used in Photonics Integrated and Metalens, because its long transmitting bandwidth, many scienist do the reserach on its optical application.

we are good at silicon nitride deposition not only LPCVD silicon nitride but also pecvd nitride.


in this article, i want to share the picture of pecvd sin on glass  and its thickness and refraction index testing result 

Silicon Nitride on Glass Refraction Index Data.txt




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About Us

OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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