SAB8300--semi-automatic C2C bonding machine
| Pressure range/pressure control stability | 2~2000N/3000N：±2N |
Post-bonding accuracy | ≤±2μm；≤±1μm；≤±500nm |
Pressure head temperature control range Pressure head temperature control stability | RT~300℃ ±1℃ |
Pressure head heating rate (RT-250℃) | 5min |
The upper and lower pressure heads correspond to the sample size | top 0.4*0.4~50*50mm; Bottom 2*2~100*100mm |
cooling method | Gas cooling |
Bonding chamber atmosphere | Vacuum, formic acid atmosphere, inert atmosphere |
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
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