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4H SICOI Wafer --Silicon carbide for integrated photonics

Date: 2024-10-01 15:36:51     Hits: 12

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Silicon carbide for integrated photonics.pdf

We provide 4-6 inch SICOI wafers (silicon carbide on insulator wafers). The wafers use surface activated bonding technology to bond thermal oxide wafers and 4H high-purity semi-insulating silicon carbide wafers together, and then control the thickness to the thickness you need through ion implantation, annealing, thinning or direct thinning and CMP polishing. It is worth noting that ion implantation and direct CMP and thinning have their own advantages and disadvantages.we also have many stock ,you can visit this page to know more : SICOI Wafer( Silicon Carbide on Insualtor)


The article **"Silicon Carbide for Integrated Photonics"** provides an extensive review of the use of silicon carbide (SiC) in photonic integrated circuits (PICs). Here's a summary of the key points:


1. **Introduction to Photonic Integrated Circuits (PICs):**

   - Photons are widely used in information technology due to their high speed, low power consumption, and weak interaction with other materials.

   - PICs are designed to manipulate photonic bits on a chip, offering scalability, stability, and a wide range of applications such as ultra-high-speed optical transceivers, neuromorphic computing, and terabit-scale communications.

   - Traditional silicon platforms face challenges, such as the lack of integrated light sources due to silicon’s indirect bandgap and limitations in nonlinear optical functionalities.


2. **SiC as a Promising Material for PICs:**

   - Silicon carbide (SiC) is recognized as a third-generation semiconductor with significant potential for PICs because of its wide bandgap, high refractive index, strong nonlinear optical properties, and ability to host optically readable spin defects.

   - SiC is compatible with CMOS fabrication processes, making it a strong candidate for the development of integrated photonic systems for both classical and quantum applications.


3. **Fabrication of SiC-Based Light Confinement Structures:**

   - The article discusses various fabrication techniques for light confinement in SiC platforms, such as selective etching of 3C-SiC on silicon, angled etching on bulk 4H-SiC, and dopant-selective etching for multiple 4H-SiC layers.

   - The development of silicon carbide-on-insulator (SiCOI) platforms, akin to silicon-on-insulator (SOI), provides scalable and efficient methods for fabricating SiC-based devices.


4. **Applications of SiC in Photonic Devices:**

   - SiC platforms are used to fabricate critical photonic devices such as waveguides, optical resonators (including micro-ring resonators and photonic crystal cavities), and nonlinear optical elements (e.g., second-harmonic generation and four-wave mixing).

   - The article highlights the potential of SiC for nonlinear photonics, with applications in high-speed signal processing, frequency conversion, sensing, and quantum information processing.


5. **Nonlinear Optical Properties:**

   - SiC exhibits both second- and third-order nonlinearities, enabling efficient optical frequency conversion and electro-optic modulation.

   - Recent research has demonstrated the potential for achieving high-Q resonators, second-harmonic generation (SHG), and broadband Kerr frequency comb generation using SiC platforms.


6. **Quantum Photonics and Optomechanics:**

   - SiC has unique capabilities in quantum photonics due to its ability to host optically active spin defects, making it suitable for quantum information processing and communication.

   - The article also explores SiC’s optomechanical properties, which allow for the manipulation of photons and phonons on the same platform.


7. **Challenges and Future Outlook:**

   - While SiC shows great promise, challenges remain in optimizing the material quality and device fabrication processes, particularly in reducing defects that affect optical losses.

   - The potential for large-scale, low-cost production of SiC devices is promising, but more research is needed to fully exploit SiC's capabilities for integrated photonics and quantum technologies.


In conclusion, silicon carbide is emerging as a highly versatile and valuable material for the future of photonic integrated circuits, offering solutions for both classical and quantum applications. The article outlines significant advancements in SiC technology, while also pointing out the challenges that need to be addressed to realize its full potential.


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OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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