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The article presents a high-performance longitudinal leaky surface acoustic wave (LLSAW) device designed for 5G new radio (NR) n78 band applications. The device is based on a composite substrate structure consisting of an X-cut lithium niobate (LiNbO3) thin film and a Bragg reflector made of alternating layers of SiO2 and Ta2O5.
Key highlights of the research include:
The fabrication of LLSAW resonators that exhibit an excellent admittance ratio (AR) and a large electromechanical coupling coefficient (k²_t), achieving impressive performance across the 3.2–3.7 GHz frequency range.
A resonator at 3.317 GHz achieved an AR of 67 dB, k²_t of 20.4%, and a Bode-Qmax of 1219.
The fabricated filter with a center frequency of 3.4 GHz demonstrated low insertion loss (1.35 dB), a 3-dB bandwidth of 433 MHz, and significant stopband attenuation, including 43 dB at the n41 band.
The filter showed a low temperature coefficient of frequency (TCF) of −35.6/−40.2 ppm/°C and exhibited robust performance under high-linearity conditions, with a 1-dB compression point (P1dB) of 15.2 dBm and an input third-order intercept point (IIP3) of 52.3 dBm.
The results underscore the potential of LLSAW technology based on X-cut LiNbO3 thin film and SiO2/Ta2O5 reflectors for advanced 5G communications, offering a promising solution for 5G NR filters.
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
