Paper Download
Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators.pdf
We provide 4-6 inch LTOI wafers (thin film lithium tantalate),We can provide 4inch 6inch 8inch(on developing) lithium tantalate on insulator wafer , Both thin film (300-600nm) by smartcut process and Thick Film (>600nm) by Grinding+CMP processTo learn more, please click the following link：https://en.omedasemi.com/litao3_on_insulator.html
The paper titled "Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators" introduces a novel approach for integrating high-performance electro-optic (EO) modulators based on lithium tantalate (LiTaO3) thin films using the copper Damascene process. This technique, typically used in semiconductor manufacturing, allows for the creation of low-loss electrodes and enables efficient chip-on-wafer bonding, which is essential for tight integration with electronics.
The work highlights the fabrication of modulator devices featuring lower microwave losses (around 10%) compared to conventional gold electrode-based designs. The copper Damascene process provides a flat surface and low resistivity electrodes, which improve the overall performance of the modulators. These devices demonstrated high-speed data transmission capabilities, with transmission rates of 416 Gbit/s for PAM4 and 540 Gbit/s for PAM8, maintaining a low bit error ratio below the 25% SD-FEC threshold.
The paper emphasizes the scalability and integration potential of these modulators for next-generation electro-optic integrated circuits (EO PICs), offering a pathway to high-performance, low-cost manufacturing. Furthermore, the copper-based electrodes enable efficient microwave transmission and offer compatibility with standardized fabrication processes, making them suitable for large-scale commercial production. The study's results show that the copper Damascene process improves both the electro-optic modulation properties and the integration potential for future high-capacity optical communication systems.
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
