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Near_6-GHz_Longitudinal_Leaky_SAW_Filters_with_Spurious_Mitigation_on_LiNbO3_SiO2_SiC_Platform.pdf
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The article titled **"Near 6-GHz Longitudinal Leaky SAW Filters with Spurious Mitigation on LiNbO₃/SiO₂/SiC Platform"** discusses the development of high-frequency, spurious-free longitudinal leaky surface acoustic wave (LLSAW) filters for advanced 5G and WiFi 6 applications.
### Key Points:
1. **Objective**:
- The study aims to create high-performance LLSAW filters operating near 6 GHz with effective spurious mode suppression. These filters are designed to meet the high-speed, large-bandwidth demands of modern wireless communication systems, especially for 5G applications.
2. **Materials and Structure**:
- The filters use a 32° Y-45° X lithium niobate (LiNbO₃, LN) thin film on a SiO₂/SiC platform. The SiC substrate helps confine acoustic energy and reduce energy leakage, while the SiO₂ layer improves thermal stability.
- Two types of electrodes (copper and aluminum) were compared, and copper (Cu) was chosen due to its superior electromechanical coupling and spurious mode mitigation properties.
3. **Design and Simulation**:
- FEM (finite element method) simulations were conducted to optimize the thicknesses of the LiNbO₃ film (180 nm) and the copper electrodes (40 nm). These parameters were critical in achieving high coupling (keff²) of 13.4% and a phase velocity of 6000 m/s.
- The optimization also focused on minimizing spurious modes, which can degrade filter performance.
4. **Fabrication**:
- The LLSAW filters were fabricated on a LiNbO₃/SiO₂/SiC platform using ion-slicing and lift-off processes. The 180 nm LiNbO₃ film and 40 nm Cu IDTs were precisely arranged to ensure high-quality resonator performance.
5. **Results**:
- The fabricated LLSAW resonators achieved center frequencies of 5.66 GHz and 5.96 GHz with fractional bandwidths (FBW) of 6.1% and 6.8%, respectively.
- The insertion loss (IL) was low, around 2.0 to 2.5 dB, and the out-of-band (OoB) rejection reached 26–28 dB, demonstrating excellent performance across a wide frequency range.
- The spurious modes were effectively suppressed, resulting in clean frequency responses without in-band ripples.
6. **Conclusion**:
- This study successfully demonstrates the potential of LLSAW filters on a LiNbO₃/SiO₂/SiC platform for high-frequency applications. The optimized design provides both high electromechanical coupling and efficient spurious mode suppression, making it a promising solution for 5G and WiFi 6 systems.
This research highlights the importance of material selection, precise fabrication, and optimization in developing high-performance, spurious-free SAW filters for next-generation communication technologies【29†source】.
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