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Enlarging Rayleigh Elimination Window through Modulating Substrate and LiNbO₃ Cut Angle for Fabricating LNOI-Based Spurious-Free Wideband SAW Filters

Date: 2024-09-22 11:15:15     Hits: 9

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Enlarging_Rayleigh_Elimination_Window_through_Modulating_Substrate_and_LiNbO3_Cut_Angle_for_Fabricating_LNOI-Based_Spurious-Free_Wideband_SAW_Filters.pdf

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The article titled **"Near 6-GHz Longitudinal Leaky SAW Filters with Spurious Mitigation on LiNbO₃/SiO₂/SiC Platform"** discusses the development of high-frequency, spurious-free longitudinal leaky surface acoustic wave (LLSAW) filters for advanced 5G and WiFi 6 applications.




The article titled "Enlarging Rayleigh Elimination Window through Modulating Substrate and LiNbO₃ Cut Angle for Fabricating LNOI-Based Spurious-Free Wideband SAW Filters" focuses on improving the design of wideband surface acoustic wave (SAW) filters using a lithium niobate on insulator (LNOI) platform. The main findings are as follows:


1. **Objective**: The study aims to investigate the effects of substrate materials and lithium niobate (LN) cut angles on the Rayleigh elimination window (REW), which is essential for creating spurious-free wideband SAW filters. The REW refers to a range where Rayleigh modes are eliminated, thereby reducing interference.


2. **Methodology**: 

   - The authors used finite element method (FEM) simulations to study different substrate materials (SiC, Si, Al₂O₃, diamond, and quartz) and LN cut angles.

   - They fabricated resonators and filters on rotated YX-LN/SiO₂/substrate platforms and tested them.


3. **Key Findings**:

   - The LN/SiO₂/SiC platform exhibited the widest REW, indicating the elimination of Rayleigh modes in a Cu electrode normalized thickness range (ΔhCu/λ) of 0.08 when the cut angle (θ) was between 18° and 24°.

   - Filters fabricated on the 20° and 25° YX-LN/SiO₂/SiC platforms were spurious-free and showed a 3-dB fractional bandwidth (FBW) of approximately 20% with a minimum insertion loss (ILmin) of about 1.2 dB.


4. **Conclusion**: The results provide a guideline for designing spurious-free wideband SAW filters, which can aid the development of 5G front-end integration by optimizing the LNOI platform through substrate and cut angle modulation.


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