LiNbO₃/SiO₂/SiC POI Wafer---THEORECTICAL OPTIMAZATION OF SURFACE ACOUSTIC WAVES RESONATOR BASED ON 37Y-47 LINBO3/SIO2/SIC MULTILAYERED STRUCTURE

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Theorectical_Optimazation_of_Surface_Acoustic_Waves_Resonator_based_on_37Y-47X_LINBO3_SIO2_SIC_Multilayered_Structure.pdf

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The article titled "Theoretical Optimization of Surface Acoustic Waves Resonator Based on 37°Y-47°X LiNbO₃/SiO₂/SiC Multilayered Structure" presents a study on optimizing the design of surface acoustic wave (SAW) resonators for high-frequency applications, particularly in 5G communication systems.

Key Points:

1. Objective:

• The study focuses on designing a multilayer SAW resonator using a 37°Y-47°X LiNbO₃/SiO₂/SiC structure.

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• The goal is to achieve high electromechanical coupling coefficient (K²), high phase velocity, and near-zero temperature coefficient of frequency (TCF), which are critical for 5G applications.

2. Methodology:

• Finite Element Method (FEM) simulations were used to optimize the thickness of LiNbO₃, SiO₂, and aluminum electrodes in the multilayer structure.

• The study explores the impact of different material layer thicknesses on the resonator's performance, including K², phase velocity, and TCF.

3. Optimization Results:

• The optimal parameters were found to be a LiNbO₃ thickness of 0.08λ, SiO₂ thickness of 0.2λ, and electrode thickness of 0.056λ.

• These parameters resulted in a K² of 10.95%, a phase velocity of 5800.43 m/s, and a TCF of -0.1 ppm/°C, making it highly suitable for 5G RF filters.

4. Conclusions:

• The optimized structure is promising for manufacturing low-loss, broadband RF SAW filters, which are essential for 5G communications.

• The study suggests that the combination of LiNbO₃ with SiO₂ and SiC provides effective temperature compensation and enhanced electromechanical properties for high-frequency applications.