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Strained GeOi EPI Wafer

12inch Strained GeOI Wafer Product Information:


(1) Device Layer:

Thickness: 15nm

Device Layer Composition: Si0.25Ge0.75~Pure Ge Doping: w/o doping (P-type)

Strain: Compressive, -1.6%@Si0.25Ge0.75

Defect Density:<1E15 cm-3

Surface Roughness:<1nm

(2) BOX Layer

Material: SiO2

Thickness: 20nm

(3)Handle Wafer:SIlicon 775um P100 1-100ohm*cm SSP 



We also offer other types of GEOI products:


MOS, Quantum, FinFET:

Strained germanium wafers/Unstrained germanium wafers

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Silicon photonics:

Germanium epitaxial wafers on silicon waveguides for silicon germanium detectors (Naura Technology Group equipment, max 12 inch)

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Mid- and far-infrared germanium waveguides: GeOi wafers:

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Semiconductor equipment manufacturers, wet chemical plants:

Epiaxial germanium wafers of different compositions

5% 10% 15% 20% 25% 30% 50% 75% 100% germanium epitaxial substrates, max 12 inch


About Us

OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.

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