High Li Lithium Tantalate (HLT) wafers for surface acoustic waves
| Tangential | Y36°-X ；Y42°-X ； | |||
Diameter | 76.2±0.2mm | 100.0±0.2mm | 150.0±0.2mm | |
PF length | 22±2mm | 32±2mm | 47.5±2mm | |
Curie temperature | 675±5℃ | |||
SF length | Depending on customer requirements | |||
Thicknesses | 180~250±20μm, 350±20μm | |||
WARP | <25μm | |||
BOW | -25μm<BOW<25μm | |||
TTV | <5μm | |||
PLTV（LTV<1μm) | >95%(5mm*5mm) | |||
| Positive Roughness (Ra) | <1nm | |||
| Backside Roughness (Ra) | Gc1000# and customized | |||
| Number of surface defects (diameter＜0.3μm) | <500 | |||
| Conductivity(Ω- ·1 cm) | Blackened:1×10 -11 -1×10 -12 | No blackened:1×10 -15 -1×10 -16 | ||
| ApplicationAreas | SAW devices with special requirements for temperature stability and electromechanical coupling coefficients | |||
Acoustic surface wave high Li lithium tanta late wafers (HIGT Li LiTaO3 ; HLT) acoustic basic performance index:
| tangential | Y36° | Y36° | |
wavedirection | X | X | |
Electromechanicalcouplingcoefficient(%) | 9.6 | 11.2 | |
Temperaturefrequencycoefficient(ppm/°C) | -12 | -18.3 | |
SurfaceAcousticWaveVelocity(m/s) | 4196 | 4078 | |
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
