**Metalens Fabrication

Grating and metasurface processing

Capabilities:

●Application range: AR/VR/PESEL/VCSEL/DFB/

●Material:

Metal: gold/silver/copper/aluminum

Non-metal: amorphous silicon/Si3N4/SiO2/TiO2/GaN/GaAs/InP

●Type: straight grating/flashing grating/multi-level grating/superstructure/short/circular/triangular and its combination

●Performance:

Si feature size 60nm, aspect ratio 10:1, steepness 90±3°

SiO2     feature size 90nm, aspect ratio 4:1, steepness 85±3°

Si3N4     feature size 55nm, aspect ratio 4:1, steepness 85±3°

InP     feature size 100nm, aspect ratio 10:1, steepness 85±3°

GaAs     feature size 90nm, aspect ratio 10:1, steepness 85±3°

Aluminum     Feature size 100nm, aspect ratio 3:1, steepness 85±3°

Gold     Feature size 100nm, aspect ratio 3:1, steepness 85±3°

Silver     Feature size 100nm, aspect ratio 3:1, steepness 85±3°

Ta2O5    

GaN

TiO2     Feature size 100nm, aspect ratio 8:1, steepness 85±3°

Amorphous silicon     Feature size 100nm, aspect ratio 10:1, steepness 85±3°

CASE1；Amorphous Silicon Metastructure