Grating and metasurface processing
Capabilities:
●Application range: AR/VR/PESEL/VCSEL/DFB/
●Material:
Metal: gold/silver/copper/aluminum
Non-metal: amorphous silicon/Si3N4/SiO2/TiO2/GaN/GaAs/InP
●Type: straight grating/flashing grating/multi-level grating/superstructure/short/circular/triangular and its combination
●Performance:
Si feature size 60nm, aspect ratio 10:1, steepness 90±3°
SiO2 feature size 90nm, aspect ratio 4:1, steepness 85±3°
Si3N4 feature size 55nm, aspect ratio 4:1, steepness 85±3°
InP feature size 100nm, aspect ratio 10:1, steepness 85±3°
GaAs feature size 90nm, aspect ratio 10:1, steepness 85±3°
Aluminum Feature size 100nm, aspect ratio 3:1, steepness 85±3°
Gold Feature size 100nm, aspect ratio 3:1, steepness 85±3°
Silver Feature size 100nm, aspect ratio 3:1, steepness 85±3°
Ta2O5
GaN
TiO2 Feature size 100nm, aspect ratio 8:1, steepness 85±3°
Amorphous silicon Feature size 100nm, aspect ratio 10:1, steepness 85±3°
Case 1: Ta2O5 Metasurface
Case 2:GaN Matesurface
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
