For Piezoelectric Device
Single Crystal PZT thin film show extremely strong piezoelectric/inverse piezoelectric effects, with piezoelectric coefficients ranging from d31 to 180 pm/V and d33 to 400 pm/V.
The material exhibits extremely high stability, with a heat resistance temperature reaching 600 ºC, far exceeding that of existing piezoelectric functional ceramics.
1-2 μm thick SCP single crystal thin film is grown on silicon substrates, is compatible with semiconductor processes, and is suitable for mass production of MEMS chips.
Comparison：
| Material | Piezoelectric coefficient d31 (pm/V) | polarization process | Curie temperature (°C) | Dielectric constant |
| SCPZT piezoelectric single crystal | 180 | unnecessary | 600 | ~300 |
| Polycrystalline PZT | ~150 | High temperature and high pressure polarization | <400 | 2000 |
| ALN | 10 | unnecessary | - | 10 |
| AlScN | 45 | unnecessary | - | 15 |
* Application :
electro-optic modulators
optical switches
optical gyroscopes
acousto-optic devices
optical MEMS
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
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