LPCVD low-stress silicon nitride and near-stoichiometric silicon nitride thin films
Shanghai Aomai Dawa provides LPCVD silicon nitride coating. The silicon nitride we offer mainly falls into two categories
#Low-stress silicon nitride film, primarily used in silicon nitride windows, MEMS devices, etc., possesses extremely low stress and remains uncracked even in a very thin state
Supported sizes: 4 inches, 6 inches, 8 inches
#Near-stoichiometric silicon nitride thin films, primarily used for low-loss silicon nitride optical waveguides, exhibit extremely high optical quality. The loss can be reduced to within 0.1db/cm after being fabricated into optical waveguides
Supported sizes: 4 inches, 6 inches, 8 inches
Low-stress silicon nitride uniformity, stress, and refractive index data
800nm low-stress silicon nitride
800nm low-stress silicon nitride.jpg
800nm low-stress silicon nitride..jpg
420nm low stress silicon nitride
420nm low stress silicon nitride.jpg
420nm low stress silicon nitride..png
Near-stoichiometric silicon nitride, uniformity, refractive index data
400nm low-loss silicon nitride
N and K Value of Silicon Nitride of SiNOI wafer.xlsx
400nm low-loss silicon nitride.jpg
About Us:
OMeda was founded in 2021 by three experienced technicians and project personnel with over seven years of experience in the micro-nano processing industry. Currently, we have 15 employees who possess extensive experience in various fields such as micro-nano processing (coating, lithography, etching, two-photon printing, bonding). Additionally, we support nanofabrication for 4/6/8-inch wafers. Some of our equipment and processes are capable of supporting 12-inch wafer processes. We cater to industries such as MEMS sensors, flexible sensors, microfluidics, and micro-nano optics.
Room 450, No. 188, Yesheng Road, Lingang New Area, China (Shanghai) Pilot Free Trade Zone. Tel: +86 188 233 40140. Email: jing.chen@omeda-optics.com
Source: OMeda
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
