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Highly efficient lead zirconate titanate ring modulator.pdf
PZT film is a material with a super strong electro-optical effect, and its electro-optical coefficient is 6 times that of LiNbO3. At the same time, PZT has nonlinear effect, acousto-optic effect, and piezoelectric effect.
* Application : electro-optic modulators
optical switches
optical gyroscopes
acousto-optic devices
optical MEMS
Spec:
PZT:300nm or other thickness
Sio2:2um 5um or other thickness
Si 525um
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This article presents the development of a highly efficient lead zirconate titanate (PZT) ring modulator integrated on a SiO₂/Si substrate, aimed at advancing high-speed electro-optic (EO) modulators for optical communication. The modulator demonstrates a high EO coefficient of 100 pm/V and efficient tuning, with a tuning efficiency of 35.8 pm/V, corresponding to a VπL of 1.17 V⋅cm. This is achieved through the careful design of a PZT thin film, which is fabricated using a chemical solution deposition process on a SiO₂/Si substrate.
The device utilizes ridge waveguides to maximize the overlap between the optical field and the electric field within the PZT layer, ensuring high performance. A significant feature of the modulator is its ability to operate at data rates up to 56 Gbit/s with an extinction ratio of approximately 3.1 dB. The modulator's performance is characterized by high-speed modulation, with clear eye diagrams at 56 Gbit/s, indicating that the device is suitable for high-bandwidth optical interconnects.
This PZT-based modulator is compared with previous devices, showing advantages in terms of EO tunability and propagation loss. The results suggest that PZT ring modulators offer a promising solution for dense photonic integrated circuits, combining high-speed performance with low energy consumption, making them well-suited for next-generation telecommunications and optical interconnects.
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
