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Fabrication and characterization of silicon-on-insulator wafers.pdf
Summary Silicon-on-Insulator (SOI) wafers offer significant advantages in integrated circuits (ICs) and microelectromechanical systems (MEMS) due to their buried oxide (BOX) layer, which improves electrical isolation, reduces parasitic capacitance, and enhances radiation resistance. This paper reviews major fabrication methods and characterization techniques for SOI wafers.
OMeda (Shanghai Omedasemi Co.,Ltd) was founded in 2021 by 3 doctors with more than 10 years of experience in nanpfabrication. It currently has 15 employees and has rich experience in nanofabrication (coating, lithography, etching, two-photon printing, bonding) and other processes. We support nanofabrication of 4/6/8-inch wafers.
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